000			00336nam a22001337a 4500
008			170526b xxu||||| |||| 00| 0 eng d
020			_a9780195105087
041			_aeng
080			_a621.3
100			_a25
101			_aIM
245			_aTHE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION _cCAMPBEL.S.A
942			_2udc _cBK
999			_c14444 _d14444